[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Volcano Defect Prevention in Tungsten Contact Formation for Embedded Non-volatile Memory
Han, Zheng, Qiong, Luo, Chengang, Feng, Song, Rao Xue, Yan, Huang Jing, Ling, Tan YunYear:
2019
Language:
english
DOI:
10.1109/EDTM.2019.8731242
File:
PDF, 127 KB
english, 2019