Large deformation and rapid response of spatial light modulators fabricated with suspended polymer
Hanabusa, Yuki, Ikuta, Takashi, Maehashi, KenzoVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0892
Date:
June, 2019
File:
PDF, 748 KB
english, 2019