Removing process of the three-dimension periodic...

Japanese Journal of Applied Physics 2019 / 06 Vol. 58; Iss. SD

Removing process of the three-dimension periodic nanostructure fabricated from KMPR photoresist

Wang, Xudongfang, Ishikawa, Yasuaki, Araki, Shinji, Uenuma, Mutsunori, Uraoka, Yukiharu
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Volume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0dea
Date:
June, 2019
File:
PDF, 1.01 MB
english, 2019
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