A micro-machined flow sensor formed on copper on a...

Japanese Journal of Applied Physics 2019 / 06 Vol. 58; Iss. SD

A micro-machined flow sensor formed on copper on a polyimide substrate and its application to respiration measurement

Kato, Ayami, Hasegawa, Yoshihiro, Taniguchi, Kazuhiro, Matsushima, Miyoko, Kawabe, Tsutomu, Shikida, Mitsuhiro
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Volume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0dec
Date:
June, 2019
File:
PDF, 1.49 MB
english, 2019
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