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[IEEE 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Erlagol (2018.6.29-2018.7.3)] 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Realization of Results of Laboratory Researches in Industrial Scales
Khmelev, Vladimir N., Tsyganok, Sergey N., Golykh, Roman N., Kuzovnikov, Yuriy M., Nesterov, Viktor A.Year:
2018
Language:
english
DOI:
10.1109/EDM.2018.8435039
File:
PDF, 381 KB
english, 2018