Molecular dynamics simulation of helium ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2019 / 10 Vol. 456

Molecular dynamics simulation of helium ion implantation into silicon and its migration

Liu, Lei, Xu, Zongwei, Li, Rongrong, Zhu, Rui, Xu, Jun, Zhao, Junlei, Wang, Chao, Nordlund, Kai, Fu, Xiu, Fang, Fengzhou
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Volume:
456
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2019.06.034
Date:
October, 2019
File:
PDF, 8.35 MB
english, 2019
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