Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology
Ma, Yali, Liu, Wenkai, Liu, ChongLanguage:
english
Journal:
Nanotechnology and Precision Engineering
DOI:
10.1016/j.npe.2019.07.002
Date:
July, 2019
File:
PDF, 2.35 MB
english, 2019