Emergence of high quality sputtered III-nitride...

Semiconductor Science and Technology 2019 / 07

Emergence of high quality sputtered III-nitride semiconductors and devices

Izyumskaya, Natalia, Avrutin, Vitaliy, Ding, Kai, Ozgur, Umit, Morkoc, Hadis, Fujioka, Hiroshi
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Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab3374
Date:
July, 2019
File:
PDF, 2.53 MB
english, 2019
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