Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Devices
UEDA, Toshitsugu, KOHSAKA, Fusao, IINO, Toshio, YAMAZAKI, DaisukeVolume:
23
Year:
1987
Language:
english
Journal:
Transactions of the Society of Instrument and Control Engineers
DOI:
10.9746/sicetr1965.23.1233
File:
PDF, 635 KB
english, 1987