Atomic layer deposition (ALD) on inorganic or polymeric membranes
Weber, Matthieu, Julbe, Anne, Kim, Sang Sub, Bechelany, MikhaelVolume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5103212
Date:
July, 2019
File:
PDF, 1.30 MB
english, 2019