Effects of Fluorine Plasma Treatment on Au-Free Ohmic...

IEEE Transactions on Electron Devices 2019 / 7 Vol. 66; Iss. 7

Effects of Fluorine Plasma Treatment on Au-Free Ohmic Contacts to Ultrathin-Barrier AlGaN/GaN Heterostructure

Wang, Yuankun, Huang, Sen, Wang, Xinhua, Kang, Xuanwu, Zhao, Rui, Zhang, Yichuan, Zhang, Sheng, Fan, Jie, Yin, Haibo, Liu, Chunyu, Shi, Wen, He, Quanbo, Li, Yankui, Wei, Ke, Zheng, Yingkui, Liu, Xinyu
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Volume:
66
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2019.2916997
Date:
July, 2019
File:
PDF, 943 KB
2019
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