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Microsystem Technologies 2019 / 7

Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements

Parmar, Yashoda, Gupta, Nidhi, Gond, Vinita, Lamba, S. S., Vanjari, Siva Rama Krishna, Dutta, Shankar, Jain, K. K., Bhattacharya, D. K.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04561-6
Date:
July, 2019
File:
PDF, 1.07 MB
english, 2019
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