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AdaBalGAN: An Improved Generative Adversarial Network With Imbalanced Learning for Wafer Defective Pattern Recognition
Wang, Junliang, Yang, Zhengliang, Zhang, Jie, Zhang, Qihua, Chien, Wei-Ting KaryVolume:
32
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2019.2925361
Date:
August, 2019
File:
PDF, 41 KB
english, 2019