High-SPL Air-coupled Piezoelectric Micromachined Ultrasonic...

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High-SPL Air-coupled Piezoelectric Micromachined Ultrasonic Transducers based on 36% ScAlN Thin-film

Kusano, Yuri, Ishii, Itaru, Kamiya, Tatsuya, Teshigahara, Akihiko, Luo, Guo-Lun, Horsley, David A.
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Year:
2019
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/tuffc.2019.2921983
File:
PDF, 825 KB
2019
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