Computer modeling of single-layer nanocluster formation in a thin SiO 2 layer buried in Si by ion mixing and thermal phase decomposition
Prüfer, Thomas, Möller, Wolfhard, Heinig, Karl-Heinz, Wolf, Daniel, Engelmann, Hans-Jürgen, Xu, Xiaomo, von Borany, JohannesVolume:
125
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5096451
Date:
June, 2019
File:
PDF, 2.32 MB
english, 2019