Rapid measurement of large step heights using a microscopic...

Surface Topography: Metrology and Properties 2019 / 06 Vol. 7; Iss. 2

Rapid measurement of large step heights using a microscopic white-light spectral interferometer

Guo, Tong, Yuan, Lin, Chen, Zhuo, Gao, Feng, Jiang, Xiangqian
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Volume:
7
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/ab2b20
Date:
June, 2019
File:
PDF, 1.60 MB
2019
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