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Sensors and Actuators A: Physical 2019 / 7

Photonic Crystal Slab Biosensors Fabricated with Helium Ion Lithography (HIL)

Zhuo, Yue, Hu, Huan, Wang, Yifei, Marin, Thibault, Lu, Meng
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.07.017
Date:
July, 2019
File:
PDF, 1.60 MB
english, 2019
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