Temporal evolution of a capacitively coupled argon...

Plasma Sources Science and Technology 2019 / 06 Vol. 28; Iss. 6

Temporal evolution of a capacitively coupled argon discharge due to the sputtering of an oxide layer on an aluminum electrode

Qiu, Jie, Li, Jiang-Tao, Chen, Wen-Cong, Wang, Zhen-Bin, Liu, Fei-Xiang, Pu, Yi-Kang
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Volume:
28
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab2184
Date:
June, 2019
File:
PDF, 1.42 MB
english, 2019
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