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Flexible heterogeneous integration of PZT film by controlled spalling technology
He, Jian, Zhang, Jing, Qian, Shuo, Chen, Xi, Qian, Jichao, Hou, Xiaojuan, Mu, Jiliang, Geng, Wenping, Cho, Jundong, Chou, XiujianLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2019.151696
Date:
August, 2019
File:
PDF, 2.40 MB
english, 2019