A parylene coating system specifically designed for...

Review of Scientific Instruments 2019 / 08 Vol. 90; Iss. 8

A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications

Gluschke, J. G., Richter, F., Micolich, A. P.
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Volume:
90
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5099293
Date:
August, 2019
File:
PDF, 4.55 MB
english, 2019
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