Broad Ion Beam Grid Cutting with Gatan PECS for 3D Scanning...

Microscopy and Microanalysis 2003 / 09 Vol. 9; Iss. S03

Broad Ion Beam Grid Cutting with Gatan PECS for 3D Scanning Electron Microscopy and Microanalysis of Integrated Circuits and Layered Structures

Hauffe, W., Gloess, D.
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Volume:
9
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927603016088
Date:
September, 2003
File:
PDF, 360 KB
english, 2003
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