AIP Conference Proceedings [AIP Publishing APPLIED PHYSICS OF CONDENSED MATTER (APCOM 2019) - Strbske Pleso, Slovak Republic (19–21 June 2019)] APPLIED PHYSICS OF CONDENSED MATTER (APCOM 2019) - Comparison of TiO2 active area of gas sensors enhanced by annealing and RIE etching
Nemec, Pavol, Hotový, Ivan, Andok, Robert, Kostič, IvanVolume:
2131
Year:
2019
Language:
english
DOI:
10.1063/1.5119484
File:
PDF, 1.88 MB
english, 2019