A flexible resistive temperature detector (RTD) based on...

Microelectronic Engineering 2019 / 08 Vol. 216

A flexible resistive temperature detector (RTD) based on in-situ growth of patterned Ag film on polyimide without lithography

Kang, Ling, Shi, Yalin, Zhang, Jian, Huang, Chun, Zhang, Nan, He, Yaqin, Li, Wei, Wang, Chaolun, Wu, Xing, Zhou, Xiaofeng
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Volume:
216
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111052
Date:
August, 2019
File:
PDF, 1.60 MB
2019
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