Effect of Surface Etching Conditions on Stacking Faults in...

Materials Science Forum 2019 / 7 Vol. 963

Effect of Surface Etching Conditions on Stacking Faults in 4H-SiC Epitaxy

Rana, Tawhid, Chung, Gil Yong, Anderson, Steve, Manning, Ian, Bowen, Willie, Sanchez, Edward
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Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.963.119
Date:
July, 2019
File:
PDF, 2.04 MB
english, 2019
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