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Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding
Sun, Lei, Liu, Lingpeng, Qi, Liping, Guo, Ran, Li, Kehong, Yin, Zhifu, Wu, Dongjiang, Zhou, Jiangang, Zou, HelinLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04565-2
Date:
July, 2019
File:
PDF, 1.04 MB
english, 2019