Analytical modeling of n-type doped silicon elastic...

Sensors and Actuators A: Physical 2019 / 10 Vol. 297

Analytical modeling of n-type doped silicon elastic constants and frequency-compensation of Lamé mode microresonators

Rajai, Payman, Ahmed, Hasnet, Straeten, Matthew, Xereas, George, Ahamed, Mohammed Jalal
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Volume:
297
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.07.032
Date:
October, 2019
File:
PDF, 2.26 MB
english, 2019
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