Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by...

Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing

Xin, Yu, Pandraud, Gregory, Zhang, Yongmeng, French, Paddy
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Volume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19153383
Date:
August, 2019
File:
PDF, 3.34 MB
english, 2019
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