Electrical Characterization of MOCVD Grown Single Crystalline AlN Thin Films on 4H-SiC
Khosa, Rabia Y., Chen, J.T., Pálsson, K., Karhu, Robin, Hassan, Jawad, Rorsman, Niklas, Sveinbjörnsson, Einar Ö.Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.963.460
Date:
July, 2019
File:
PDF, 711 KB
english, 2019