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Dit control during heating and cooling steps of dry oxidation for reliable gate insulator in SiC MOSFETs
Kobayashi, Keisuke, Shimizu, Haruka, Shima, AkioLanguage:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab367b
Date:
July, 2019
File:
PDF, 1.30 MB
english, 2019