VUV/O3 activated direct heterogeneous bonding towards high-performance LiNbO3-based optical devices
Xu, Jikai, Wang, Chenxi, Zhang, Runbo, Cheng, Ji, Li, Ge, Xiang, Junshan, Tian, YanhongVolume:
495
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.143576
Date:
November, 2019
File:
PDF, 2.78 MB
english, 2019