Electrical and patterning properties of direct nanoimprinted indium oxide (In 2 O 3 ) and indium tin oxide (ITO)
Jain, Puneet, Su, Chang, Haga, Ken-ichi, Tokumitsu, EisukeVolume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0888
Date:
June, 2019
File:
PDF, 1.29 MB
2019