Development of oriented metallic patterns using LIGA process for focused anti-scatter grid application
Kim, Kanghyun, Park, Kyungjin, Lim, Geunbae, Kim, Jong HyunVolume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab0ff4
Date:
June, 2019
File:
PDF, 905 KB
2019