Formation of low resistance contacts to p-type 4H-SiC using laser doping with an Al thin-film dopant source
Okamoto, Kento, Kikuchi, Toshifumi, Ikeda, Akihiro, Ikenoue, Hiroshi, Asano, TanemasaVolume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab12c3
Date:
June, 2019
File:
PDF, 510 KB
2019