Study on powder preparation of IGZO target and its effect...

Journal of Alloys and Compounds 2019 / 09 Vol. 800

Study on powder preparation of IGZO target and its effect on sintering

Chen, Jie, Zhong, Jingming, Luo, Wen, Qi, Chao, Sun, Benshuang, Liu, Shuai, Liu, Bingning, Shu, Yongchun, He, Jilin
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Volume:
800
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2019.06.031
Date:
September, 2019
File:
PDF, 4.32 MB
2019
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