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Nanoscale depth control of implanted shallow silicon vacancies in silicon carbide
Li, Qiang, Wang, Jun-Feng, Yan, Fei-Fei, Cheng, Ze-Di, Liu, Zheng-Hao, Zhou, Kun, Guo, Liping, Zhou, Xiong, Zhang, Weiping, Wang, Xiu-Xia, Huang, Wei, Xu, Jin-Shi, Li, Chuan-Feng, Guo, Guang-CanYear:
2019
Language:
english
Journal:
Nanoscale
DOI:
10.1039/c9nr05938e
File:
PDF, 4.44 MB
english, 2019