Role of 1,2-benzisothiazolin-3-one (BIT) in the Improvement of Barrier CMP Performance with Alkaline Slurry
Ma, Tengda, Tan, Baimei, Liu, Yuling, Niu, Xinhuan, Liu, Guorui, Wang, Chenwei, Luo, Chong, Xu, Yi, Kao, ZhengxiaoVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0041909jss
File:
PDF, 1.39 MB
english, 2019