Inorganic Nano/Micropattern Fabrication Method Using...

Journal of Photopolymer Science and Technology 2017 Vol. 30; Iss. 5

Inorganic Nano/Micropattern Fabrication Method Using Nanoimprint Lithography and Physical Rubbing

Kojima, Ryota, Mizawa, Takahide
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Volume:
30
Year:
2017
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.30.527
File:
PDF, 1.35 MB
english, 2017
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