Deposition and Characterization of Thin Si-B-C-N Films by...

Journal of Superhard Materials 2019 / 3 Vol. 41; Iss. 2

Deposition and Characterization of Thin Si-B-C-N Films by DC Reactive Magnetron Sputtering of Composed Si/B4C Target

Onoprienko, A. A., Ivashchenko, V. I., Kozak, A. O., Sinelnichenko, A. K., Tomila, T. V.
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Volume:
41
Language:
english
Journal:
Journal of Superhard Materials
DOI:
10.3103/S1063457619020035
Date:
March, 2019
File:
PDF, 602 KB
english, 2019
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