Atomic layer deposition of epitaxial ferroelectric barium...

Journal of Applied Physics 2019 / 08 Vol. 126; Iss. 6

Atomic layer deposition of epitaxial ferroelectric barium titanate on Si(001) for electronic and photonic applications

Lin, Edward L., Posadas, Agham B., Zheng, Lu, Elliott Ortmann, J., Abel, Stefan, Fompeyrine, Jean, Lai, Keji, Demkov, Alexander A., Ekerdt, John G.
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Volume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5087571
Date:
August, 2019
File:
PDF, 1.85 MB
english, 2019
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