Effect of imprinting times and stress annealing on warm laser shock imprinting
Xiong, Fei, Yang, Haifeng, Liu, Kun, Man, Jiaxiang, Chen, HaoxueLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04552-7
Date:
July, 2019
File:
PDF, 5.21 MB
english, 2019