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Effect of imprinting times and stress annealing on warm...

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Effect of imprinting times and stress annealing on warm laser shock imprinting

Xiong, Fei, Yang, Haifeng, Liu, Kun, Man, Jiaxiang, Chen, Haoxue
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-019-04552-7
Date:
July, 2019
File:
PDF, 5.21 MB
english, 2019
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