Novel sputtering method to obtain wide band gap and low...

Materials Science in Semiconductor Processing 2019 / 12 Vol. 104

Novel sputtering method to obtain wide band gap and low resistivity in as-deposited magnesium doped zinc oxide films

Loeza-Poot, M., Mis-Fernández, R., Rimmaudo, I., Camacho-Espinosa, E., Peña, J.L.
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Volume:
104
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104646
Date:
December, 2019
File:
PDF, 2.33 MB
english, 2019
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