Demonstration of dielectric measurement using...

Demonstration of dielectric measurement using probe-backside reflection method up to 300 GHz

Sakamaki, Ryo, Horibe, Masahiro, YOSHIDA, MANABU, TSURUMI, Takaaki
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Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab36f6
Date:
July, 2019
File:
PDF, 788 KB
english, 2019
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