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High quality NbTiN films fabrication and rapid thermal annealing investigation
Ge, Huan, Jin, Yi-Rong, Song, Xiao-HuiVolume:
28
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/28/7/077402
Date:
July, 2019
File:
PDF, 1.07 MB
2019