Ab Initio Study of the Early Stage of Si Epitaxy on the Chlorinated Si(100) Surface
Pavlova, Tatiana V., Skorokhodov, Egor S., Zhidomirov, Georgy M., Eltsov, Konstantin N.Volume:
123
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.9b06128
Date:
August, 2019
File:
PDF, 4.17 MB
english, 2019