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System of vacuum mechanisms failure prediction based on outgassing flows dynamic
Deulin, E A, Mikhailov, V P, Emelianenko, R OVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012016
Date:
July, 2018
File:
PDF, 745 KB
english, 2018