Effects of oxygen flow rates on the physical...

Vacuum 2019 / 10 Vol. 168

Effects of oxygen flow rates on the physical characteristics of magnetron sputtered CuO films

Li, Jingjie, Zhao, Yang, Wang, Hui, Zhou, Yijian, Zhang, Meng, Fu, Hongyuan, Zhang, Baoping, Li, Xinzhong, Yang, Fan
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Volume:
168
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.108811
Date:
October, 2019
File:
PDF, 1.59 MB
2019
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