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Effects of surface pretreatment and deposition conditions on the gas permeation properties and flexibility of Al2O3 films on polymer substrates by atomic layer deposition
Su, Dung-Yue, Kuo, Yueh-Hua, Tseng, Ming-Hung, Tsai, Feng-YuLanguage:
english
Journal:
Journal of Coatings Technology and Research
DOI:
10.1007/s11998-019-00238-x
Date:
June, 2019
File:
PDF, 427 KB
english, 2019