Laser Thermal Processing of Alternate Dopants in Silicon

MRS Proceedings 2002 Vol. 717

Laser Thermal Processing of Alternate Dopants in Silicon

Clark, Mark H., Jones, Kevin S., Rendon, Michael, Gable, Kevin A.
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Volume:
717
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-717-C1.11
File:
PDF, 231 KB
english, 2002
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