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Determination of heat fluxes and surface temperatures during magnetron sputtering with a cold and hot target
Bychkov, S PVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012010
Date:
July, 2018
File:
PDF, 1003 KB
english, 2018