Magnetron with a sputtering unit for deposition of binary...

IOP Conference Series Materials Science and Engineering 2018 / 07 Vol. 387

Magnetron with a sputtering unit for deposition of binary alloy films and solid solutions of two compounds

Shapovalov, V I, Kozin, A A, Minzhulina, E A, Smirnov, V V
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Volume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012070
Date:
July, 2018
File:
PDF, 725 KB
english, 2018
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